An Investigation of Operating Methods for 0.25 Micron Semiconductor Manufacturing

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Title: An Investigation of Operating Methods for 0.25 Micron Semiconductor Manufacturing
Author: Hallas, James F.; Kim, Jane D.; Internicola, Carolyn; Mosier, Charles T.
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 1996
Series/Report No.: Winter Simulation Conference Proceedings
URI: http://www.lib.ncsu.edu/resolver/1840.4/6819


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