Development of Generic Simulation Models to Evaluate Wafer Fabrication Cluster Tools

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Title: Development of Generic Simulation Models to Evaluate Wafer Fabrication Cluster Tools
Author: Pierce, Neal G.; Drevna, Michael J.
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 1992
Series/Report No.: Winter Simulation Conference Proceedings
URI: http://www.lib.ncsu.edu/resolver/1840.4/6821


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