Development of Generic Simulation Models to Evaluate Wafer Fabrication Cluster Tools

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dc.contributor.author Pierce, Neal G.
dc.contributor.author Drevna, Michael J.
dc.date.accessioned 2012-01-12T18:51:04Z
dc.date.available 2012-01-12T18:51:04Z
dc.date.issued 1992
dc.identifier.uri http://www.lib.ncsu.edu/resolver/1840.4/6821
dc.format.extent 676778 bytes
dc.format.mimetype application/pdf
dc.format.mimetype application/pdf
dc.language.iso en
dc.publisher Institute of Electrical and Electronics Engineers (IEEE)
dc.relation.ispartofseries Winter Simulation Conference Proceedings
dc.title Development of Generic Simulation Models to Evaluate Wafer Fabrication Cluster Tools
dc.type Technical report


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