Supporting Semiconductor Manufacturing Simulation Tools Using a Structured Data Model

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Title: Supporting Semiconductor Manufacturing Simulation Tools Using a Structured Data Model
Author: Baum, Susan S.; Glassey, Peter G.
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 1992
Series/Report No.: Winter Simulation Conference Proceedings
URI: http://www.lib.ncsu.edu/resolver/1840.4/7323


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