The Simulation of Cluster Tools: A New Semiconductor Manufacturing Technology

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Title: The Simulation of Cluster Tools: A New Semiconductor Manufacturing Technology
Author: LeBaron, H.T.; Pool, M.
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 1994
Series/Report No.: Winter Simulation Conference Proceedings
URI: http://www.lib.ncsu.edu/resolver/1840.4/7695


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