Achieving uniformity in a semiconductor fabrication process using spatial modeling

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Title: Achieving uniformity in a semiconductor fabrication process using spatial modeling
Author: Hughes-Oliver, Jacqueline M.; Lu, Jye-Chyi; Davis, J. C.; Gyurcsik, Ronald S.
Publisher: North Carolina State University. Dept. of Statistics
Date: 1995
Series/Report No.: Institute of Statistics mimeo series
2277
URI: http://www.stat.ncsu.edu/information/library/mimeo.archive/ISMS_1995_2277.pdf
http://www.lib.ncsu.edu/resolver/1840.4/8510


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