Real-time process monitoring by P-polarized reflectance spectroscopy and closed-loop control of vapor phase epitaxy

Files

crsc-tr00-15.pdf (81.54 KB)

Date

2000

Authors

Banks, Harvey Thomas

Dietz, Nikolaus A.

Series/Report No.

CRSC-TR00-15
Center for Research in Scientific Computation Technical Report

Publisher

North Carolina State University. Center for Research in Scientific Computation

URI

http://www.ncsu.edu/crsc/reports/ftp/pdf/crsc-tr00-15.pdf
http://www.lib.ncsu.edu/resolver/1840.4/606

Collections

Center for Research in Scientific Computation