Precise and Flexible Modeling for Semiconductor Wafer Fabrication

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dc.contributor.authorNakamura, Shinji
dc.contributor.authorHashimoto, Chisato
dc.contributor.authorMori, Osamu
dc.date.accessioned2012-01-12T18:50:42Z
dc.date.available2012-01-12T18:50:42Z
dc.date.issued1993
dc.format.extent1350725 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypeapplication/pdf
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.4/6690
dc.language.isoen
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relation.ispartofseriesWinter Simulation Conference Proceedings
dc.titlePrecise and Flexible Modeling for Semiconductor Wafer Fabrication
dc.typeTechnical report

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