Autocorrelation of Cycle Times in Semiconductor Manufacturing Systems

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dc.contributor.authorSchmig, Alexander K.
dc.contributor.authorMittler, Manfred
dc.date.accessioned2012-01-12T18:49:04Z
dc.date.available2012-01-12T18:49:04Z
dc.date.issued1995
dc.format.extent1050990 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypeapplication/pdf
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.4/6178
dc.language.isoen
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relation.ispartofseriesWinter Simulation Conference Proceedings
dc.titleAutocorrelation of Cycle Times in Semiconductor Manufacturing Systems
dc.typeTechnical report

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