Method for fabricating transistor gate structures and gate dielectrics thereof
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2006
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Visokay, M. R., Colombo, L., Chambers, J. J., Rotondaro, A. L., & Bu, H. (2006). Method for fabricating transistor gate structures and gate dielectrics thereof. U.S. Patent No. 7,135,361. Washington, DC: U.S. Patent and Trademark Office.
