Methods, apparatus and slurries for chemical mechanical planarization

No Thumbnail Available

Files

US_6623355_B2_I.pdf (132.31 KB)

Date

2003

Authors

Advisors

Journal Title

Series/Report No.

Journal ISSN

Volume Title

Publisher

Abstract

Description

Keywords

Citation

McClain, J. B., & DeSimone, J. M. (2003). Methods, apparatus and slurries for chemical mechanical planarization. U.S. Patent No. 6,623,355. Washington, DC: U.S. Patent and Trademark Office.

URI

http://www.lib.ncsu.edu/resolver/1840.2/1541

Degree

Discipline

Collections

Publications