Methods, apparatus and slurries for chemical mechanical planarization

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dc.date.accessioned2008-10-15T21:07:55Z
dc.date.available2008-10-15T21:07:55Z
dc.date.issued2003
dc.format.extent135481 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationMcClain, J. B., & DeSimone, J. M. (2003). Methods, apparatus and slurries for chemical mechanical planarization. U.S. Patent No. 6,623,355. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1541
dc.language.isoen
dc.titleMethods, apparatus and slurries for chemical mechanical planarization
dc.typePatent

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