A Markov Chain Framework for Approximation of Cycle Time in Semiconductor Manufacturing Toolsets.

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dc.contributor.advisorYahya Fathi, Committee Chairen_US
dc.contributor.advisorJames Wilson, Committee Memberen_US
dc.contributor.advisorCharles Culbreth Jr, Committee Memberen_US
dc.contributor.advisorReha Uzsoy, Committee Memberen_US
dc.contributor.advisorSHANTIKUMAR, J. GEORGE (E), Committee Memberen_US
dc.contributor.advisorJanice Wells, Committee Memberen_US
dc.contributor.authorAkhavan-Tabatabaei, Rahaen_US
dc.date.accepted2010-12-01en_US
dc.date.accessioned2010-12-02T08:00:52Z
dc.date.available2010-12-02T08:00:52Z
dc.date.defense2010-11-11en_US
dc.date.issued2010-11-11en_US
dc.date.released2010-12-02en_US
dc.date.reviewed2010-11-15en_US
dc.date.submitted2010-11-12en_US
dc.degree.disciplineIndustrial Engineeringen_US
dc.degree.leveldissertationen_US
dc.degree.nameDoctor of Philosophyen_US
dc.descriptionNorth Carolina State University Theses Industrial Engineering.
dc.formatPh.D. North Carolina State University, 2011.
dc.identifier.otherdeg465en_US
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.16/6513
dc.rightsI hereby certify that, if appropriate, I have obtained and attached hereto a written permission statement from the owner(s) of each third party copyrighted matter to be included in my thesis, dissertation, or project report, allowing distribution as specified below. I certify that the version I submitted is the same as that approved by my advisory committee. I hereby grant to NC State University or its agents the non-exclusive license to archive and make accessible, under the conditions specified below, my thesis, dissertation, or project report in whole or in part in all forms of media, now or hereafter known. I retain all other ownership rights to the copyright of the thesis, dissertation or project report. I also retain the right to use in future works (such as articles or books) all or part of this thesis, dissertation, or project report.en_US
dc.titleA Markov Chain Framework for Approximation of Cycle Time in Semiconductor Manufacturing Toolsets.en_US
dcterms.extentvi, 77 pages : illustrations (some color)

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