Methods of growing epitaxial silicon

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US_7115489_B2_I.pdf (90.98 KB)

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2006

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Ramaswamy, N., & Basceri, C. (2006). Methods of growing epitaxial silicon. U.S. Patent No. 7,115,489. Washington, DC: U.S. Patent and Trademark Office.

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http://www.lib.ncsu.edu/resolver/1840.2/1762

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