Methods of growing epitaxial silicon

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dc.date.accessioned2008-10-17T18:44:44Z
dc.date.available2008-10-17T18:44:44Z
dc.date.issued2006
dc.format.extent93165 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationRamaswamy, N., & Basceri, C. (2006). Methods of growing epitaxial silicon. U.S. Patent No. 7,115,489. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1762
dc.language.isoen
dc.titleMethods of growing epitaxial silicon
dc.typePatent

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