Broadband spectroscopic rotating compensator ellipsometer

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US_6449043_B2_I.pdf (152.62 KB)

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2002

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Aspnes, D. E., & Opsal, J. (2002). Broadband spectroscopic rotating compensator ellipsometer. U.S. Patent No. 6,449,043. Washington, DC: U.S. Patent and Trademark Office.

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http://www.lib.ncsu.edu/resolver/1840.2/1675

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