Chemical vapor deposition methods of forming barium strontium titanate comprising dielectric layers, including such layers having a varied concentration of barium and strontium within the layer
dc.date.accessioned | 2008-10-17T18:17:31Z | |
dc.date.available | 2008-10-17T18:17:31Z | |
dc.date.issued | 2006 | |
dc.format.extent | 131112 bytes | |
dc.format.mimetype | application/pdf | |
dc.identifier.citation | Basceri, C., & Alzola, N. (2006). Chemical vapor deposition methods of forming barium strontium titanate comprising dielectric layers, including such layers having a varied concentration of barium and strontium within the layer. U.S. Patent No. 6,982,103. Washington, DC: U.S. Patent and Trademark Office. | |
dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1733 | |
dc.language.iso | en | |
dc.title | Chemical vapor deposition methods of forming barium strontium titanate comprising dielectric layers, including such layers having a varied concentration of barium and strontium within the layer | |
dc.type | Patent |