Binary non-crystalline oxide analogs of silicon dioxide for use in gate dielectrics

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dc.date.accessioned2008-07-23T15:43:09Z
dc.date.available2008-07-23T15:43:09Z
dc.date.issued2003
dc.format.extent76504 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationLucovsky, G. (2003). Binary non-crystalline oxide analogs of silicon dioxide for use in gate dielectrics. U.S. Patent No. 6,552,403. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/941
dc.language.isoen
dc.titleBinary non-crystalline oxide analogs of silicon dioxide for use in gate dielectrics
dc.typePatent

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