Growth of polycrystalline semiconductor film with intermetallic nucleating layer

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1979

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Cuomo, J. J., DiStefano, T. H., & Rosenberg, R. (1979). Growth of polycrystalline semiconductor film with intermetallic nucleating layer. U.S. Patent No. 4,132,571. Washington, DC: U.S. Patent and Trademark Office.

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