Non-thermionic sputter material transport device, methods of use, and materials produced thereby
dc.date.accessioned | 2008-07-23T21:39:00Z | |
dc.date.available | 2008-07-23T21:39:00Z | |
dc.date.issued | 2004 | |
dc.format.extent | 72480 bytes | |
dc.format.mimetype | application/pdf | |
dc.identifier.citation | Cuomo, J. J., & Williams, N. M. (2004). Non-thermionic sputter material transport device, methods of use, and materials produced thereby. U.S. Patent No. 6,787,010. Washington, DC: U.S. Patent and Trademark Office. | |
dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/979 | |
dc.language.iso | en | |
dc.title | Non-thermionic sputter material transport device, methods of use, and materials produced thereby | |
dc.type | Patent |