Atomic layer deposition methods
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2007
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Sarigiannis, D., Derderian, G. J., Basceri, C., Sandhu, G. S., Gealy, F. D., & Carlson, C. M. (2007). Atomic layer deposition methods. U.S. Patent No. 7,303,991. Washington, DC: U.S. Patent and Trademark Office.
