Porous siliconformation and etching process for use in silicon micromachining

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dc.date.accessioned2008-10-13T19:08:45Z
dc.date.available2008-10-13T19:08:45Z
dc.date.issued1991
dc.format.extent124446 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationGuilinger, T. R., Jones, H. D. T., Kelly, M. J., Martin, S. B., Stevenson, J. O., & Tsao, S. S. (1991). Porous siliconformation and etching process for use in silicon micromachining. U.S. Patent No. 4,995,954. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1279
dc.language.isoen
dc.titlePorous siliconformation and etching process for use in silicon micromachining
dc.typePatent

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