Optimization of Metal Gate Electrode Stacks for Work Function Tuning

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dc.contributor.advisorDoug Barlage, Committee Memberen_US
dc.contributor.advisorVeena Misra, Committee Chairen_US
dc.contributor.advisorCarlton Osburn, Committee Memberen_US
dc.contributor.advisorGregory Parsons, Committee Memberen_US
dc.contributor.authorLee, JaeHoonen_US
dc.date.accessioned2010-04-02T18:43:38Z
dc.date.available2010-04-02T18:43:38Z
dc.date.issued2007-08-22en_US
dc.degree.disciplineElectrical Engineeringen_US
dc.degree.leveldissertationen_US
dc.degree.namePhDen_US
dc.identifier.otheretd-08172006-122158en_US
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.16/4052
dc.rightsI hereby certify that, if appropriate, I have obtained and attached hereto a written permission statement from the owner(s) of each third party copyrighted matter to be included in my thesis, dissertation, or project report, allowing distribution as specified below. I certify that the version I submitted is the same as that approved by my advisory committee. I hereby grant to NC State University or its agents the non-exclusive license to archive and make accessible, under the conditions specified below, my thesis, dissertation, or project report in whole or in part in all forms of media, now or hereafter known. I retain all other ownership rights to the copyright of the thesis, dissertation or project report. I also retain the right to use in future works (such as articles or books) all or part of this thesis, dissertation, or project report.en_US
dc.subjectwork functionen_US
dc.subjecthigh-ken_US
dc.subjecttunungen_US
dc.subjectmetal gateen_US
dc.subjectRuen_US
dc.subjectTaen_US
dc.subjectRu-Taen_US
dc.subjectstacken_US
dc.titleOptimization of Metal Gate Electrode Stacks for Work Function Tuningen_US

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