Extraction of spatially varying dielectric function from ellipsometric data

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US_5277747_A_I.pdf (133.5 KB)

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1994

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Aspnes, D. E. (1994). Extraction of spatially varying dielectric function from ellipsometric data. U.S. Patent No. 5,277,747. Washington, DC: U.S. Patent and Trademark Office.

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http://www.lib.ncsu.edu/resolver/1840.2/1590

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