Extraction of spatially varying dielectric function from ellipsometric data

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dc.date.accessioned2008-10-15T22:39:53Z
dc.date.available2008-10-15T22:39:53Z
dc.date.issued1994
dc.format.extent136700 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationAspnes, D. E. (1994). Extraction of spatially varying dielectric function from ellipsometric data. U.S. Patent No. 5,277,747. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1590
dc.language.isoen
dc.titleExtraction of spatially varying dielectric function from ellipsometric data
dc.typePatent

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