Selective germanium deposition on silicon and resulting structures

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US_5089872_A_I.pdf (103.95 KB)

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1992

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Ozturk, M., Wortman, J., & Grider, D. (1992). Selective germanium deposition on silicon and resulting structures. U.S. Patent No. 5,089,872. Washington, DC: U.S. Patent and Trademark Office.

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http://www.lib.ncsu.edu/resolver/1840.2/1233

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