Method and apparatus for cleaning substrates using liquid carbon dioxide

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dc.date.accessioned2008-10-15T21:03:50Z
dc.date.available2008-10-15T21:03:50Z
dc.date.issued2004
dc.format.extent142620 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationDeSimone, J. M., DeYoung, J. P., & McClain, J. B. (2004). Method and apparatus for cleaning substrates using liquid carbon dioxide. U.S. Patent No. 6,763,840. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1538
dc.language.isoen
dc.titleMethod and apparatus for cleaning substrates using liquid carbon dioxide
dc.typePatent

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