Atomic layer deposition methods
| dc.date.accessioned | 2008-10-14T15:46:12Z | |
| dc.date.available | 2008-10-14T15:46:12Z | |
| dc.date.issued | 2004 | |
| dc.format.extent | 143783 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.identifier.citation | Marsh, E., Vaartstra, B., Castrovillo, P. J., Basceri, C., Derderian, G. J., & Sandhu, G. S. (2004). Atomic layer deposition methods. U.S. Patent No. 6,673,701. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1389 | |
| dc.language.iso | en | |
| dc.title | Atomic layer deposition methods | |
| dc.type | Patent |
