Chemical vapor deposition methods of forming barium strontium titanate comprising dielectric layers

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dc.date.accessioned2008-10-13T20:13:12Z
dc.date.available2008-10-13T20:13:12Z
dc.date.issued2005
dc.format.extent143490 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationBasceri, C., & Azola, N. (2005). Chemical vapor deposition methods of forming barium strontium titanate comprising dielectric layers. U.S. Patent No. 6,838,122. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1312
dc.language.isoen
dc.titleChemical vapor deposition methods of forming barium strontium titanate comprising dielectric layers
dc.typePatent

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