Optimal design of a high pressure organometallic chemical vapor deposition reactor

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dc.contributor.authorBachmann, Klaus J.
dc.contributor.authorBanks, Harvey Thomas
dc.contributor.authorHopfner, Christian
dc.contributor.authorKepler, Grace M.
dc.contributor.authorLeSure, Stacie
dc.contributor.authorMcCall, Sonya D.
dc.contributor.authorScroggs, Jeffrey S.
dc.date.accessioned2006-11-14T12:46:20Z
dc.date.available2006-11-14T12:46:20Z
dc.date.issued1998
dc.format.extent926717 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypeapplication/pdf
dc.identifier.urihttp://www.ncsu.edu/crsc/reports/ftp/pdf/crsc-tr98-14.pdf
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.4/680
dc.language.isoen
dc.publisherNorth Carolina State University. Center for Research in Scientific Computation
dc.relation.ispartofseriesCRSC-TR98-14
dc.relation.ispartofseriesCenter for Research in Scientific Computation Technical Report
dc.titleOptimal design of a high pressure organometallic chemical vapor deposition reactor
dc.typeTechnical report

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