Method for optical monitoring in materials fabrication

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US_4332833_A_I.pdf (170.77 KB)

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1982

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Aspnes, D. E. (1982). Method for optical monitoring in materials fabrication. U.S. Patent No. 4,332,833. Washington, DC: U.S. Patent and Trademark Office.

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http://www.lib.ncsu.edu/resolver/1840.2/1479

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