Method for optical monitoring in materials fabrication

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dc.date.accessioned2008-10-14T18:11:28Z
dc.date.available2008-10-14T18:11:28Z
dc.date.issued1982
dc.format.extent174872 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationAspnes, D. E. (1982). Method for optical monitoring in materials fabrication. U.S. Patent No. 4,332,833. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1479
dc.language.isoen
dc.titleMethod for optical monitoring in materials fabrication
dc.typePatent

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