Long-term reliability degradation of ultrathin dielectric films due to heavy-ion irradiation

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dc.date.accessioned2008-03-03T20:44:07Z
dc.date.available2008-03-03T20:44:07Z
dc.date.issued2002
dc.format.extent637470 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationChoi, B. K., Fleetwood, D. M., Schrimpf, R. D., Massengill, L. W., Galloway, K. F., Shaneyfelt, M. R., Meisenheimer, T. L., Dodd, P. E., Schwank, J. R., Lee, Y. M., John, R. S., & Lucovsky, G. (2002). Long-term reliability degradation of ultrathin dielectric films due to heavy-ion irradiation. IEEE transactions on nuclear science, 49(6), 3045-3050.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/412
dc.language.isoen
dc.titleLong-term reliability degradation of ultrathin dielectric films due to heavy-ion irradiation
dc.typeArticle

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