Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers
No Thumbnail Available
Date
2008
Authors
Advisors
Journal Title
Series/Report No.
Journal ISSN
Volume Title
Publisher
Abstract
Description
Keywords
Citation
Beaman, K. L., Weimer, R. A., Breiner, L. D., Ping, E. X., Doan, T. T., Basceri, C., Kubista, D. J., & Zheng, L. A. (2008). Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers. U.S. Patent No. 7,344,755. Washington, DC: U.S. Patent and Trademark Office.
