Method for binding halide-based contaminants during formation of a titanium-based film

Simple item page
dc.date.accessioned2008-10-17T19:41:43Z
dc.date.available2008-10-17T19:41:43Z
dc.date.issued2007
dc.format.extent142436 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationDerderian, G. J., Basceri, C., & Westermoreland, D. L. (2007). Method for binding halide-based contaminants during formation of a titanium-based film. U.S. Patent No. 7,311,942. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1798
dc.language.isoen
dc.titleMethod for binding halide-based contaminants during formation of a titanium-based film
dc.typePatent

Files

Original bundle

Now showing 1 - 1 of 1
No Thumbnail Available
Name:
US_7311942_B2_I.pdf
Size:
139.1 KB
Format:
Adobe Portable Document Format
Download

License bundle

Now showing 1 - 1 of 1
No Thumbnail Available
Name:
license.txt
Size:
1.76 KB
Format:
Plain Text
Description:
Download

Collections

Publications