Method and apparatus for contamination control in processing apparatus containing voltage driven electrode
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1994
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Cuomo, J. J., Grazioso, M. V., Guarnieri, C. R., Haller, K. L., Heidenreich, J. E., Selwyn, G. S., & Whitehair, S. J. (1994). Method and apparatus for contamination control in processing apparatus containing voltage driven electrode. U.S. Patent No. 5,298,720. Washington, DC: U.S. Patent and Trademark Office.
