Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces
| dc.date.accessioned | 2008-10-17T19:43:31Z | |
| dc.date.available | 2008-10-17T19:43:31Z | |
| dc.date.issued | 2007 | |
| dc.format.extent | 139856 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.identifier.citation | Basceri, C., Doan, T. T., Weimer, R. A., Beaman, K. L., Breiner, L. D., Zheng, L. A., Ping, E. X., Sarigiannis, D., & Kubista, D. J. (2007). Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces. U.S. Patent No. 7,279,398. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1800 | |
| dc.language.iso | en | |
| dc.title | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces | |
| dc.type | Patent |
