Spin coating method and apparatus for liquid carbon dioxide systems
No Thumbnail Available
Date
1999
Authors
Advisors
Journal Title
Series/Report No.
Journal ISSN
Volume Title
Publisher
Abstract
Description
Keywords
Citation
DeSimone, J. M., & Carbonell, R. G. (1999). Spin coating method and apparatus for liquid carbon dioxide systems. U.S. Patent No. 6,001,418. Washington, DC: U.S. Patent and Trademark Office.
