Spectroscopic Investigation of Hf-Si Oxynitride Alloys and Low Temperature Cobalt Metal ALD

Files

etd.pdf (1.25 MB)

Date

2008-04-21

Authors

Advisors

Gregory N. Parsons, Committee Co-Chair

Mehmet C. Ozturk, Committee Member

Nadia Elmasry, Committee Member

Jon Paul Maria, Committee Co-Chair

Keywords

high-k, AES, XPS, FTIR, low temperature, QMS, ALD

URI

http://www.lib.ncsu.edu/resolver/1840.16/3677

Degree

PhD

Discipline

Materials Science and Engineering

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