Spectroscopic Investigation of Hf-Si Oxynitride Alloys and Low Temperature Cobalt Metal ALD
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Date
2008-04-21
Authors
Oh, Sang Jeong
Advisors
Gregory N. Parsons, Committee Co-Chair
Mehmet C. Ozturk, Committee Member
Nadia Elmasry, Committee Member
Jon Paul Maria, Committee Co-Chair
Journal Title
Series/Report No.
Journal ISSN
Volume Title
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Abstract
Description
Keywords
high-k, AES, XPS, FTIR, low temperature, QMS, ALD
Citation
Degree
PhD
Discipline
Materials Science and Engineering
