Spectroscopic Investigation of Hf-Si Oxynitride Alloys and Low Temperature Cobalt Metal ALD

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dc.contributor.advisorGregory N. Parsons, Committee Co-Chairen_US
dc.contributor.advisorMehmet C. Ozturk, Committee Memberen_US
dc.contributor.advisorNadia Elmasry, Committee Memberen_US
dc.contributor.advisorJon Paul Maria, Committee Co-Chairen_US
dc.contributor.authorOh, Sang Jeongen_US
dc.date.accessioned2010-04-02T18:34:25Z
dc.date.available2010-04-02T18:34:25Z
dc.date.issued2008-04-21en_US
dc.degree.disciplineMaterials Science and Engineeringen_US
dc.degree.leveldissertationen_US
dc.degree.namePhDen_US
dc.description.abstracten_US
dc.identifier.otheretd-01092008-121656en_US
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.16/3677
dc.rightsI hereby certify that, if appropriate, I have obtained and attached hereto a written permission statement from the owner(s) of each third party copyrighted matter to be included in my thesis, dis sertation, or project report, allowing distribution as specified below. I certify that the version I submitted is the same as that approved by my advisory committee. I hereby grant to NC State University or its agents the non-exclusive license to archive and make accessible, under the conditions specified below, my thesis, dissertation, or project report in whole or in part in all forms of media, now or hereafter known. I retain all other ownership rights to the copyright of the thesis, dissertation or project report. I also retain the right to use in future works (such as articles or books) all or part of this thesis, dissertation, or project report.en_US
dc.subjecthigh-ken_US
dc.subjectAESen_US
dc.subjectXPSen_US
dc.subjectFTIRen_US
dc.subjectlow temperatureen_US
dc.subjectQMSen_US
dc.subjectALDen_US
dc.titleSpectroscopic Investigation of Hf-Si Oxynitride Alloys and Low Temperature Cobalt Metal ALDen_US

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