Development of Generic Simulation Models to Evaluate Wafer Fabrication Cluster Tools

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dc.contributor.authorPierce, Neal G.
dc.contributor.authorDrevna, Michael J.
dc.date.accessioned2012-01-12T18:51:04Z
dc.date.available2012-01-12T18:51:04Z
dc.date.issued1992
dc.format.extent676778 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypeapplication/pdf
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.4/6821
dc.language.isoen
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relation.ispartofseriesWinter Simulation Conference Proceedings
dc.titleDevelopment of Generic Simulation Models to Evaluate Wafer Fabrication Cluster Tools
dc.typeTechnical report

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