Method of preparing semiconductor surfaces

No Thumbnail Available

Files

US_4380490_A_I.pdf (84.44 KB)

Date

1983

Authors

Advisors

Journal Title

Series/Report No.

Journal ISSN

Volume Title

Publisher

Abstract

Description

Keywords

Citation

Aspnes, D. E., & Studna, A. A. (1983). Method of preparing semiconductor surfaces. U.S. Patent No. 4,380,490. Washington, DC: U.S. Patent and Trademark Office.

URI

http://www.lib.ncsu.edu/resolver/1840.2/1490

Degree

Discipline

Collections

Publications