Atomic layer deposition methods
| dc.date.accessioned | 2008-10-14T15:41:03Z | |
| dc.date.available | 2008-10-14T15:41:03Z | |
| dc.date.issued | 2004 | |
| dc.format.extent | 150968 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.identifier.citation | Sarigiannis, D., Derderian, G. J., Basceri, C., Sandhu, G. S., Gealy, F. D., & Carlson, C. M. (2004). Atomic layer deposition methods. U.S. Patent No. 6,753,271. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1383 | |
| dc.language.iso | en | |
| dc.title | Atomic layer deposition methods | |
| dc.type | Patent |
