High Voltage RFEA Design, Optimization, and Operation in the Cathode of a Dual Frequency Capacitively Coupled Plasma.

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dc.contributor.advisorSteven Shannon, Chair
dc.contributor.advisorJohn Muth, Member
dc.contributor.advisorMohamed Bourham, Member
dc.contributor.advisorKatharina Stapelmann, Member
dc.contributor.advisorAlok Ranjan, External
dc.contributor.authorTalley, Matthew Lowell
dc.date.accepted2018-11-09
dc.date.accessioned2018-11-12T13:31:07Z
dc.date.available2018-11-12T13:31:07Z
dc.date.defense2018-10-19
dc.date.issued2018-10-19
dc.date.released2018-11-12
dc.date.reviewed2018-10-30
dc.date.submitted2018-10-29
dc.degree.disciplineNuclear Engineering
dc.degree.leveldissertation
dc.degree.nameDoctor of Philosophy
dc.identifier.otherdeg11448
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.20/35660
dc.rights
dc.titleHigh Voltage RFEA Design, Optimization, and Operation in the Cathode of a Dual Frequency Capacitively Coupled Plasma.

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