Thin film optical measurement system and method with calibrating ellipsometer

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dc.date.accessioned2008-10-16T16:57:51Z
dc.date.available2008-10-16T16:57:51Z
dc.date.issued2002
dc.format.extent165607 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationAspnes, D. E., Opsal, J., & Faton, J. T. (2002). Thin film optical measurement system and method with calibrating ellipsometer. U.S. Patent No. 6,411,385. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1676
dc.language.isoen
dc.titleThin film optical measurement system and method with calibrating ellipsometer
dc.typePatent

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