Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition
| dc.date.accessioned | 2008-10-17T19:05:30Z | |
| dc.date.available | 2008-10-17T19:05:30Z | |
| dc.date.issued | 2007 | |
| dc.format.extent | 130158 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.identifier.citation | Beaman, K. L., Doan, T. T., Breiner, L. D., Weimer, R. A., Ping, E. X., Kubista, D. J., Basceri, C., & Zheng, L. A. (2007). Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition. U.S. Patent No. 7,258,892. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1784 | |
| dc.language.iso | en | |
| dc.title | Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition | |
| dc.type | Patent |
