Thin film dielectrics for capacitors and methods of making thereof
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2006
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Borland, W. J., Ihlefeld, J. F., Kingon, A. I., & Maria, J. P. (2006). Thin film dielectrics for capacitors and methods of making thereof. U.S. Patent No. 7,029,971. Washington, DC: U.S. Patent and Trademark Office.
