Thin film dielectrics for capacitors and methods of making thereof

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dc.date.accessioned2008-07-28T18:04:41Z
dc.date.available2008-07-28T18:04:41Z
dc.date.issued2006
dc.format.extent71008 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationBorland, W. J., Ihlefeld, J. F., Kingon, A. I., & Maria, J. P. (2006). Thin film dielectrics for capacitors and methods of making thereof. U.S. Patent No. 7,029,971. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1206
dc.language.isoen
dc.titleThin film dielectrics for capacitors and methods of making thereof
dc.typePatent

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