Sputter deposition for multi-component thin films

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US_4923585_A_I.pdf (140.45 KB)

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1990

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Krauss, A. R., & Auciello, O. (1990). Sputter deposition for multi-component thin films. U.S. Patent No. 4,923,585. Washington, DC: U.S. Patent and Trademark Office.

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http://www.lib.ncsu.edu/resolver/1840.2/1575

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