Sputter deposition for multi-component thin films

Simple item page
dc.date.accessioned2008-10-15T22:25:58Z
dc.date.available2008-10-15T22:25:58Z
dc.date.issued1990
dc.format.extent143821 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationKrauss, A. R., & Auciello, O. (1990). Sputter deposition for multi-component thin films. U.S. Patent No. 4,923,585. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1575
dc.language.isoen
dc.titleSputter deposition for multi-component thin films
dc.typePatent

Files

Original bundle

Now showing 1 - 1 of 1
No Thumbnail Available
Name:
US_4923585_A_I.pdf
Size:
140.45 KB
Format:
Adobe Portable Document Format
Download

License bundle

Now showing 1 - 1 of 1
No Thumbnail Available
Name:
license.txt
Size:
1.76 KB
Format:
Plain Text
Description:
Download

Collections

Publications